4. Abrading
  5. Accessory

SpeedFam-IPEC Corp.

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Apparatus for handling polishing carriers

Abrading – Accessory
Patent

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Apparatus for spin drying a workpiece

Drying and gas or vapor contact with solids – Apparatus – With apparatus using centrifugal force
Patent

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Method and apparatus for monitoring and controlling the flatness

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
Patent

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Methods for the in-process detection of workpieces with a monoch

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Patent

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Semiconductor wafer polishing apparatus with a variable polishin

Abrading – Machine – Rotary tool
Patent

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Profile ID: LFUS-PAI-P-515646

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