Apparatus for spin drying a workpiece

Details Apparatus for spin drying a workpiece Apparatus for spin drying a workpiece

1997-09-10

1999-11-02

Bennett, Henry

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

F26B 1724

Patent

active

059746815

ABSTRACT:
A spin dryer assembly for drying workpieces such as semiconductor wafers includes a workpiece platform for receiving a workpiece to be dried. A motor is coupled to and spins the platform to effect removal of water and particulates from the workpiece. Gripping fingers are pivotally mounted around the platform and securely grip the workpiece during drying. Spring loaded plungers maintain the gripping fingers in a secured position during drying. A cam ring is vertically movable into and out of contact with the gripping fingers to bias the gripping portions of the fingers outwardly to a release position after drying.

REFERENCES:
patent: 4651440 (1987-03-01), Karl
patent: 4700595 (1987-10-01), Soares
patent: 4989345 (1991-02-01), Gill, Jr.
patent: 5667535 (1997-09-01), Kasahara
patent: 5775000 (1998-07-01), Maekwa et al.
patent: 5778554 (1998-07-01), Jones
patent: 5829156 (1998-11-01), Shibasaki et al.

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