Apparatus for handling polishing carriers

Details Apparatus for handling polishing carriers Apparatus for handling polishing carriers

1997-06-03

1999-08-17

Eley, Timothy V.

Abrading

Accessory

451386, 451391, 451398, 294165, 294166, B24B 2118

Patent

active

059385138

ABSTRACT:
A carrier carrying device (CCD) for holding a workpiece carrier includes a lower portion and an upper portion coupled to the lower portion. A plurality of shoulder screws are employed to couple the upper and lower portions together; the shoulder screws restrict translational movement of the upper portion to one direction relative to the lower portion. The upper portion includes a flange having a plurality of slots configured to receive a like plurality of engagement members located on the workpiece carrier. A number of springs located between the upper and lower portions cause the flange to engage and secure the engagement members to the CCD. The shoulder screws facilitate alignment of the CCD relative to the workpiece carrier during installation of the CCD.

REFERENCES:
patent: 5110001 (1992-05-01), Dunn
patent: 5584520 (1996-12-01), Niemeier
patent: 5609376 (1997-03-01), Lardinais et al.
patent: 5667265 (1997-09-01), Gebhard
patent: 5704667 (1998-01-01), Lin

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