4. Coating apparatus
  5. Gas or vapor deposition

Siqing Lu

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Gas baffle and distributor for semiconductor processing chamber

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Internal balanced coil for inductively coupled high density...

Semiconductor device manufacturing: process – Including control responsive to sensed condition
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Lid assembly for a processing system to facilitate...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
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Method and apparatus for dynamically measuring the thickness...

Electricity: measuring and testing – Magnetic – With means to create magnetic field to test material
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Showerhead with reduced contact area

Coating apparatus – Gas or vapor deposition
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Profile ID: LFUS-PAI-P-2515455

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