Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
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Eliminating metal-rich silicides using an amorphous Ni alloy...
Eliminating metal-rich silicides using an amorphous Ni alloy...
Plating seed layer including an oxygen/nitrogen transition...
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Self-aligned metal to form contacts to Ge containing...
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