Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
Inventor
active
Anchors for microelectromechanical systems having an SOI...
Anchors for microelectromechanical systems having an SOI...
Anchors for microelectromechanical systems having an SOI...
Component including a fixed element that is in a silicon...
Crack and residue free conformal deposited silicon oxide...
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Profile ID: LFUS-PAI-P-2276837