4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Siamak Salimian

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Apparatus and method for actively controlling the DC potential o

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Chuck having pressurized zones of heat transfer gas

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Configurable single substrate wet-dry integrated cluster...

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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Configurable single substrate wet-dry integrated cluster...

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Reexamination Certificate

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Correction of wafer temperature drift in a plasma reactor...

Thermal measuring and testing – Temperature measurement – Combined with diverse art device
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Profile ID: LFUS-PAI-P-49155

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