4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Shusaku Yanagawa

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Manufacturing method for semiconductor device

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Reexamination Certificate

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Method of etching and anti-reflection film using substituted...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of plasma etching

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Substrate processing apparatus and method for manufacturing...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1990731

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