4. Data processing: measuring, calibrating, or testing
  5. Measurement system in a specific environment
  6. Quality evaluation

Shuichi Chikamatsu

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Apparatus and method for testing defects

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Apparatus and method for testing defects

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate

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Apparatus and method for testing defects

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate

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Apparatus and method for testing defects

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Defect inspecting apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2236002

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