Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2007-03-05
2008-10-28
Chowdhury, Tarifur R. (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
Reexamination Certificate
active
07443496
ABSTRACT:
A defect inspection apparatus includes an illumination optical unit for obliquely illuminating an object with a slit-like shaped laser, a first detection optical unit for detecting a first image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a first direction substantially normal to a surface of the object, a second detection optical unit for detecting a second image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a second direction inclined to the normal direction to the surface of the object, an image signal processing unit which processes a signal outputted from the first detection optical unit and a signal outputted from the second detection optical unit, and an output unit which outputs information processed by the image signal processing unit.
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Chikamatsu Shuichi
Jingu Takahiro
Kembo Yukio
Matsumoto Shunichi
Matsunaga Ryouji
Akanbi Isiaka O
Antonelli, Terry Stout & Kraus, LLP.
Chowdhury Tarifur R.
Hitachi , Ltd.
Hitachi High-Technologies Corporation
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