4. Semiconductor device manufacturing: process
  5. Radiation or energy treatment modifying properties of...

Shohei Matsushita

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Method and system for improving particle beam lithography

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Reexamination Certificate

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Method and system for logic design for cell projection...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method and system for stencil design for particle beam writing

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2289706

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