Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2005-09-15
2010-06-29
Siek, Vuthe (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
Reexamination Certificate
active
07747977
ABSTRACT:
Various embodiments of the present invention relate to particle beam writing to fabricate an integrated circuit on a wafer. In various embodiments, cell projection (CP) cell library information is stored in the form of a data structure. Subsequently, the CP cell library information is referenced by a writing system. The patterns are written on the wafer depending on the referenced CP cell library.
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Lapanik Dmitri
Matsushita Shohei
Mitsuhashi Takashi
Wu Zhigang
D2S, Inc.
Lin Aric
Siek Vuthe
The Mueller Law Office, P.C.
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