4. Heating
  5. Heat generator heats gas or liquid material in a flow structure
  6. With means utilizing the heated material for heating work

Shintaro Aoyama

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High-dielectric film substrate processing method

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Method and device for processing substrate, and apparatus...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method and system for forming a stacked gate insulating film

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method for forming insulating film on substrate, method for...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method for forming insulating film on substrate, method for...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1821953

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