Method and device for processing substrate, and apparatus...

Details Method and device for processing substrate, and apparatus... Method and device for processing substrate, and apparatus...

2006-10-24

2006-10-24

Sarkar, Asok Kumar (Department: 2891)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C257SE21224

Reexamination Certificate

active

07125799

ABSTRACT:
A substrate processing method includes the step of removing carbon from a silicon substrate surface and planarizing the silicon substrate surface from which carbon has been removed.

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European Search Report, Mar. 28, 2006.

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