4. Semiconductor device manufacturing: process
  5. Making passive device
  6. Stacked capacitor

Shinichi Tachi

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Apparatus for cleaning semiconductor wafers in a vacuum...

Brushing – scrubbing – and general cleaning – Machines – With air blast or suction
Reexamination Certificate

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Dry chemical-mechanical polishing method

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Dry etching apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Dry etching apparatus and method

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Dry etching by alternately etching and depositing

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Profile ID: LFUS-PAI-P-35125

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