4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant

Shingo Okushima

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Imprint apparatus having attitude control

Plastic article or earthenware shaping or treating: apparatus – Control means responsive to or actuated by means sensing or... – Mold motion or position control
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Pattern forming method and pattern forming apparatus

Plastic and nonmetallic article shaping or treating: processes – Mechanical shaping or molding to form or reform shaped article – Shaping against forming surface
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Process for producing a chip using a mold

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2156814

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