4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Shin-Yu Nieh

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Method for fabricating a deep trench in a substrate

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Methods of seamless gap filling

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate

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Stack capacitor of memory device and fabrication method thereof

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3279304

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