4. Coating apparatus
  5. With indicating, testing, inspecting, or measuring means

Shih-Hung Li

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Apparatus and method for fast-cycle atomic layer deposition

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
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Method and apparatus for depositing material upon a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
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Methods and apparatus for improved vaporization of...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
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Process conditions and precursors for atomic layer...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Semiconductor processing chamber calibration tool

Coating apparatus – With indicating – testing – inspecting – or measuring means
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Profile ID: LFUS-PAI-P-446172

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