Semiconductor processing chamber calibration tool

Details Semiconductor processing chamber calibration tool Semiconductor processing chamber calibration tool

1998-10-30

2000-05-16

Bueker, Richard

Coating apparatus

With indicating, testing, inspecting, or measuring means

118715, 118728, C23C 1600

Patent

active

060631961

ABSTRACT:
An apparatus and method for aligning various components of a semiconductor processing system is disclosed. A calibration tool positioned on the main body of the processing chamber is used to align the coordinates of the susceptor, wafer lifting pins, susceptor shaft, wafer handling blade and the rotational axis of the susceptor with that of the main body. By aligning the various components to a common coordinate system, it is possible to more precisely control the angular orientation of a wafer being processed with that of the processing gas flow.

REFERENCES:
patent: 4951601 (1990-08-01), Maydan
patent: 5000113 (1991-03-01), Wang

Affiliated with

Also associated with

Rating

Semiconductor processing chamber calibration tool does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor processing chamber calibration tool, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor processing chamber calibration tool will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-255413