Scanning electron microscope or similar equipment

Details Scanning electron microscope or similar equipment Scanning electron microscope or similar equipment

1982-02-11

1984-03-13

Smith, Alfred E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250311, 335210, H01F 700, G01N 2300

Patent

active

044370091

ABSTRACT:
The specification describes a scanning electron microscope or similar equipment having a magnetic pole piece detachably provided in an opening of a lower pole of its electromagnetic objective lens so as to decrease the magnetic flux leaked through the opening when the specimen is placed below the lower pole. The above scanning electron microscope or similar equipment may also include a change-over system for varying the crossing point between a scanning charged particle beam and an optical axis depending whether the specimen is placed in the vicinity of the lens center of the objective lens or below the lower pole. Accordingly, the specimen can be placed either below the lower pole of the objective lens or in the vicinity of the lens center as the operator desires, thereby making the scanning electron microscope or similar equipment applicable for varied purposes. Owing to the provision of the change-over system, a specimen image of good quality can always be obtained even if the specimen is placed at different locations.

REFERENCES:
patent: 3448262 (1969-06-01), Akahori
patent: 3872305 (1975-03-01), Koike

Affiliated with

Also associated with

Rating

Scanning electron microscope or similar equipment does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning electron microscope or similar equipment, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning electron microscope or similar equipment will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-493835