Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1982-01-05
1984-07-17
Smith, Alfred E.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250306, 2504411, H01J 3700
Patent
active
044608276
ABSTRACT:
The specification describes a scanning electron microscope or similar equipment having a tiltable microscope column so as to observe a specimen at different angles without inclining the specimen. In order to make the microscope column tiltable relative to its specimen chamber, an opening is formed through a wall portion of the specimen chamber. The opening is covered up by a movable cover. A lower portion of the microscope column extends through the cover into the specimen chamber. A sealing member is provided so as to surround the opening between the wall portion and cover to ensure the hermetic sealing therebetween. Since the microscope is tilted instead of inclining the specimen stage to obtain images of the specimen seen at different angles, the specimen stage can be simplified in both structure and mechanism. The specimen stage is thus kept stationary, resulting in a complete solution to vibrations caused by conventional specimen stages and in a substantial improvement to the resolution of scanning electron microscope and similar equipment.
REFERENCES:
patent: 2215979 (1940-09-01), Schuchmann
patent: 3997807 (1976-12-01), Riddle et al.
Onoguchi Akira
Yamazaki Shigetomo
Adams Bruce L.
Burns Robert E.
Grigsby T. N.
Kabushiki Kaisha Akashi Seisakusho
Lobato Emmanuel J.
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