4. Illumination
  5. Light source and modifier
  6. Including selected wavelength modifier

Shigeru Hagiwara

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Air cleaning apparatus used for an exposure apparatus

Gas separation: apparatus – Solid sorbent apparatus – With programmed – cyclic – or time responsive control means
Patent

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Alignment apparatus in projection exposure apparatus

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent

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Exposing apparatus

Photocopying – Projection printing and copying cameras – Step and repeat
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Exposure apparatus

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Exposure apparatus

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-621705

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