Air cleaning apparatus used for an exposure apparatus

Details Air cleaning apparatus used for an exposure apparatus Air cleaning apparatus used for an exposure apparatus

1995-08-09

1997-11-11

Spitzer, Robert

Gas separation: apparatus

Solid sorbent apparatus

With programmed, cyclic, or time responsive control means

96134, 96142, 55274, B01D 5304

Patent

active

056858957

ABSTRACT:
A chemical filter for removing a chemical impurity is arranged at an air inlet, and a gas sensor for adsorbing the chemical impurity is arranged upstream of the chemical filter. The service life of the chemical filter is determined on the basis of the resonance frequency of the gas sensor. Alternatively, the chemical filter has a specific portion whose removal capacity for the chemical impurity is lower than that of the rest, and a sensor for sensing the chemical impurity is arranged downstream of the specific portion. The service life of the chemical filter is predicted on the basis of an output from the sensor.

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