Exposing apparatus

Details Exposing apparatus Exposing apparatus

1993-12-03

1995-01-10

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

250548, 356401, G03B 2742

Patent

active

053812107

ABSTRACT:
An exposing apparatus which has an alignment apparatus for detecting the relative positional relation between a mask having a pattern for transfer formed thereon and a photosensitive substrate having an alignment mark thereon by applying alignment light to the alignment mark and which exposes the photosensitive substrate to exposure light transmitted through the pattern for transfer, through a projection optical system includes an alignment optical system for causing the alignment light to pass at least once through the projection optical system, the alignment light being of a wavelength in the vicinity of three times the wavelength of the exposure light.

REFERENCES:
patent: 4812880 (1989-03-01), Ogawa et al.
patent: 4870452 (1989-09-01), Tanimoto et al.
patent: 5137363 (1992-08-01), Kosugi et al.
patent: 5138176 (1992-08-01), Nishi
patent: 5150173 (1992-09-01), Isobe et al.
patent: 5184196 (1993-02-01), Nakagawa et al.
patent: 5204535 (1993-04-01), Mizutani
patent: 5272501 (1993-12-01), Nishi et al.

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