4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Shigeo Okayama

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Charged beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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Lens for charged particle beam

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Method of measurement by scanning tunneling microscope

Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent

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Pattern forming apparatus using quadrupole lenses

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Profile ID: LFUS-PAI-P-259060

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