Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1988-10-13
1990-02-20
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250306, H01J 3726
Patent
active
049028928
ABSTRACT:
A probe is shifted at a distance where the probe and a material to be obsed are sufficiently far away from each other relative to the roughness of the material's surface. This method prevents the probe from colliding with the material's surface during the shift of the probe thereby enabling high speed shift of the probe. Further, a micro-drive mechanism for controlling tunnel currents may be stopped during the shift in order to minimize the drift which may be caused by heat generated inside the micro-drive mechanism. Therefore, it is particularly advantageous to apply this STM measuring method for high-speed and stable measurement of a very large surface area and a very rough surface.
REFERENCES:
patent: 4814622 (1989-03-01), Gregory et al.
Pohl et al., Rev. Sci. Instrum. 59(6), Jun. 1988, pp. 840-842.
Bando Hiroshi
Mizutani Wataru
Nakagawa Haruki
Okayama Shigeo
Shigeno Masatsugu
Adams Bruce L.
Agency of Industrial Science and Technology, Kosaka Laboratory L
Berman Jack I.
Seiko Instruments Inc.
Wilks Van C.
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