4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With workpiece support

Shibu Gangadharan

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In-situ pre-coating of plasma etch chamber for improved...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate

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Method for hard mask CD trim

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method for hard mask CD trim

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Method for hard mask CD trim

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3062951

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