Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
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Composite dielectric films
CVD Ta2O5/oxynitride stacked gate insulator with TiN gate...
CVD Ta2O5/oxynitride stacked gate insulator with TiN gate...
Gate dielectric based on oxynitride grown in N.sub.2 O and annea
Leakage current reduction of a tantalum oxide layer via a nitrou
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