4. Semiconductor device manufacturing: process
  5. Miscellaneous

Shawn Hamilton

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Closed loop temperature heat up and control utilizing...

Heating – Heating or heat retaining work chamber structure
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Load lock design for rapid wafer heating

Semiconductor device manufacturing: process – Miscellaneous
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Loadlock designs and methods for using same

Material or article handling – Apparatus for moving material between zones having different...
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Profile ID: LFUS-PAI-P-2334663

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