4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Shane P. Leiphart

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Advanced barrier liner formation for vias

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Electrically isolated collimator and method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Enhanced barrier liner formation for via

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Enhanced barrier liner formation for vias

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Insitu faceting during deposition

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent

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Profile ID: LFUS-PAI-P-390702

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