4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Shane J. Trapp

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Integrated circuitry

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Method for forming a contact opening in a semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Method of forming integrated circuitry and method of forming...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Method of forming integrated circuitry, and method of...

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method to eliminate striations and surface roughness caused...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-2286365

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