4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Seshadri Ramaswami

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Continuous, non-agglomerated adhesion of a seed layer to a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Copper target for sputter deposition

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Fabricating plug and near-zero overlap interconnect line

Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor – Groove
Reexamination Certificate

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Holding apparatus, a metal deposition system, and a wafer proces

Fishing – trapping – and vermin destroying
Patent

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Holding apparatus, a metal deposition system, and a wafer proces

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Patent

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Profile ID: LFUS-PAI-P-354585

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