4. Etching a substrate: processes
  5. Gas phase etching of substrate

Seong Jin Koh

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High-density field emission elements and a method for...

Etching a substrate: processes – Gas phase etching of substrate
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Positioning of nanoparticles and fabrication of single...

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is
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Semiconductor device barrier layer

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
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