Apparatus for conditioning processing pads

Details Apparatus for conditioning processing pads Apparatus for conditioning processing pads

2007-02-27

2007-02-27

Rose, Robert A. (Department: 3723)

Abrading

Accessory

Dressing

C451S056000

Reexamination Certificate

active

11102052

ABSTRACT:
Embodiments of a flexible pad conditioner for conditioning a processing pad are provided. The pad conditioner includes an arc-shaped member having an abrasive bottom surface configured for conditioning the processing pad. Means are provided to apply a downward force as well as to oscillate the pad conditioner. Further means may be provided to vary the downward force along the length of the pad conditioner. In one embodiment, a plurality of actuators may be coupled to a top surface of the member and adapted to selectively provide an independently controllable force against the member to finely control the conditioning profile.

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