Apparatus for conditioning processing pads

Details Apparatus for conditioning processing pads Apparatus for conditioning processing pads

2008-10-09

2010-11-09

Rose, Robert (Department: 3727)

Abrading

Precision device or process - or with condition responsive...

Computer controlled

C451S021000, C451S443000

Reexamination Certificate

active

07828626

ABSTRACT:
Embodiments of an apparatus for conditioning a processing pad are provided. In one embodiment, an apparatus for conditioning a processing pad includes a member having a bottom surface selectively maintained in a non-planar orientation and an abrasive disposed on the bottom surface of the member. The abrasive is configured for conditioning a processing pad. The member and abrasive have a profile that produces a non-planar processing pad surface.

REFERENCES:
patent: 5605499 (1997-02-01), Sugiyama et al.
patent: 5885137 (1999-03-01), Ploessl
patent: 5938507 (1999-08-01), Ko et al.
patent: 6767427 (2004-07-01), Walters et al.
patent: 7004825 (2006-02-01), Taylor et al.

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