4. Drying and gas or vapor contact with solids
  5. Apparatus
  6. With means to treat gas or vapor

Semifab Incorporated

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Docking and environmental purging system for integrated circuit

Ventilation – Clean room
Patent

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Docking and environmental purging system for integrated circuit

Ventilation – Clean room
Patent

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Filter cartridge assembly for a gas purging system

Liquid purification or separation – Flow – fluid pressure or material level – responsive – Check valve
Reexamination Certificate

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Molecular contamination control system

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Molecular contamination control system

Coating apparatus – Gas or vapor deposition
Patent

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