Docking and environmental purging system for integrated circuit

Details Docking and environmental purging system for integrated circuit Docking and environmental purging system for integrated circuit

1998-10-21

2000-09-19

Joyce, Harold

Ventilation

Clean room

414940, B65G 2500

Patent

active

061203718

ABSTRACT:
The docking and purging system docks a modular isolation container for substrates used in manufacturing integrated circuits for purging and processing in a processing environment. A door portion of the docking and purging system includes a shelf for receiving the modular isolation container before insertion in a docking chamber formed in the housing connected for communication with the processing environment. A vacuum manifold with suction cups is provided for gripping and removing the modular isolation container door to allow access to the interior chamber of the modular isolation container. The docking chamber and interior chamber of the modular isolation container can also be purged of particulate contaminates by filtered air or inert gas ducted to the docking chamber.

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