4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Semiconductor Process Laboratory Co.

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Method for epitaxial growth

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
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Method for epitaxial growth and apparatus for epitaxial growth

Coating apparatus – Gas or vapor deposition – With treating means
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Method for removal of resist film and method for production of s

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Removal of imaged layers
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