4. Radiant energy
  5. Ion generation
  6. Electron bombardment type

SemEquip Inc.

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Cluster ion implantation for defect engineering

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Dual mode ion source for ion implantation

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Reexamination Certificate

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Electron beam ion source with integral low-temperature...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Reexamination Certificate

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Electron beam ion source with integral low-temperature...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Reexamination Certificate

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External cathode ion source

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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