4. Radiant energy
  5. Ion generation
  6. Electron bombardment type

Semequip Inc.

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Dual mode ion source for ion implantation

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Electron impact ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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Electron impact ion source

Radiant energy – Ion generation – Electron bombardment type
Reexamination Certificate

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Ion implantation device and a method of semiconductor...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Ion implantation ion source, system and method

Radiant energy – Ion generation – Field ionization type
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