4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Sayaka Tanimoto

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Charged particle beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Charged particle beam apparatus and pattern measuring method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Charged particle beam application system

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Electron beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Electron beam writing equipment and electron beam writing...

Radiant energy – Means to align or position an object relative to a source or...
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Profile ID: LFUS-PAI-P-2204254

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