Electron beam apparatus

Details Electron beam apparatus Electron beam apparatus

2011-02-01

2011-02-01

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S3960ML, C250S397000, C250S492300

Reexamination Certificate

active

07880143

ABSTRACT:
A plurality of primary beams are formed from a single electron source, the surface charge of a sample is controlled by at least one primary beam, and at the same time, the inspection of the sample is conducted using a primary beam other than this. Also, for an exposure area of the primary beam for surface charge control and an exposure area of the primary beam for the inspection, the surface electric field strength is set individually. Also, the current of the primary beam for surface charge control and the interval between the primary beam for surface charge control and the primary beam for inspection are controlled.

REFERENCES:
patent: 5892224 (1999-04-01), Nakasuji
patent: 6066849 (2000-05-01), Masnaghetti et al.
patent: 6172363 (2001-01-01), Shinada et al.
patent: 6914441 (2005-07-01), Talbot et al.
patent: 2005/0279936 (2005-12-01), Litman et al.
patent: 2007/0194229 (2007-08-01), Okuda et al.
patent: 2010/0181479 (2010-07-01), Knippelmeyer et al.
patent: 10-339711 (1998-12-01), None

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