4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Satoshi Morishita

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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Patent

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Dry etching method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Fuel cell having unit cells arranged to merge gases...

Chemistry: electrical current producing apparatus – product – and – With pressure equalizing means for liquid immersion operation
Reexamination Certificate

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Method of forming insulating film with few hydrogen atom inclusi

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Semiconductor device and process and apparatus of...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-120359

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