4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Sanyo Vacuum Industries Co. Ltd.

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Dry etching device

Coating apparatus – Gas or vapor deposition – Work support
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Electrode substrate for liquid crystal display device and liquid

Stock material or miscellaneous articles – Liquid crystal optical display having layer of specified... – With charge transferring layer of specified composition
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Method for forming a thin film and apparatus for the same

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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