Coating apparatus
Gas or vapor deposition
Having means to expose a portion of a substrate to coating...
Inventor
active
Deposition of film layers by alternately pulsing a precursor...
Method to improve transmittance of an encapsulating film
Multiple frequency plasma chamber with grounding capacitor...
On-site cleaning gas generation for process chamber cleaning
On-site cleaning gas generation for process chamber cleaning
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Profile ID: LFUS-PAI-P-2346568