Method and apparatus for introduction of solid precursors...

Details Method and apparatus for introduction of solid precursors... Method and apparatus for introduction of solid precursors...

2005-10-04

2005-10-04

Schillinger, Laura M (Department: 2813)

Semiconductor device manufacturing: process

Including control responsive to sensed condition

C438S005000, C438S014000, C134S001300, C134S05600D

Reexamination Certificate

active

06951765

ABSTRACT:
The present invention pertains to apparatus and methods for introduction of solid precursors and reactants into a supercritical fluid reactor. Solids are dissolved in supercritical fluid solvents in generator apparatus separate from the supercritical fluid reactor. Such apparatus preferably generate saturated solutions of solid precursors via recirculation of supercritical fluids through a vessel containing the solid precursors. Supercritical solutions of the solids are introduced into the reactor, which itself is charged with a supercritical fluid. Supercritical conditions are maintained during the delivery of the dissolved precursor to the reactor. Recirculation of supercritical precursor solutions through the reactor may or may not be implemented in methods of the invention. Methods of the invention are particularly well suited for integrated circuit fabrication, where films are deposited on wafers under supercritical conditions.

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