4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Sang-Rok Hah

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Chemical mechanical polishing apparatus

Abrading – Precision device or process - or with condition responsive... – Controlling temperature
Reexamination Certificate

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Dual damascene process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Inductor for a system-on-a-chip and a method for...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Method and apparatus for polishing a copper layer and method...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for filling a hole with a metal

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2637245

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