4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Radiation sensitive composition or product or process of making

Sang-jun Choi

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(Meth)acrylate compound having aromatic acid labile group,...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Alicyclic photosensitive polymer, resist composition...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Apparatus and method for removing photoresist from a substrate

Etching a substrate: processes – Gas phase and nongaseous phase etching on the same substrate
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Apparatus for drying substrate and method thereof

Fluent material handling – with receiver or receiver coacting mea – Plural materials – material supplies or charges in a receiver
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Apparatus of depositing thin film with high uniformity

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
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Profile ID: LFUS-PAI-P-118101

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