Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth with a subsequent step of heat treating...
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A1 x In y Ga 1-x-y N mixture crystal substrate, method of...
Al x In y Ga 1−x−y N mixture crystal substrate
Al x In y Ga 1-x-y N mixture crystal substrate, method of...
Fabrication method and fabrication apparatus of group III...
Group III nitride crystal substrate, method of its...
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