Coating apparatus
Gas or vapor deposition
With treating means
Inventor
active
Method for manufacturing a titanium nitride thin film
Method of depositing titanium nitride thin film and CVD depositi
Method of depositing titanium nitride thin film and CVD...
Method of depositing titanium-containing conductive thin film
Plasma enhanced CVD apparatus and process, and dry etching appar
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Profile ID: LFUS-PAI-P-1051912